TEL Releases New 300mm Trias SPA | Notification | Tokyo ... The Trias SPA uses unique Slot Plane Antenna (SPA) plasma, based on the Radial Line Slot Antenna (RLSA) microwave plasma developed by Professor Tadahiro Ohmi at Tohoku University. It produces high-density plasmas at low electron temperatures to enable damage-free processes at temperatures no higher than 400C. Trials of RF plasma production using different antenna ... Trials of RF plasma production using different antenna geometries with magnetic field Shunjiro Shinoharayand Tsutomu Soejima Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan Received 1 June 1998, in final form 18 September 1998 Abstract. Plasma production studies excited by the ... Floating potential measurements in the near field of an ion ... Characteristics of large-diameter plasma using a radial-line slot antenna J. Vac. Sci. Technol. A 24, 1421 (2006) Outgassing of lower hybrid antenna modules during high-power long-pulse transmission J. Vac. Sci. Technol. A 23, 55 (2005) High-density etching plasma excitation by slot type and coaxial line type of microwave antennas
Radial Line Slot Antennas | SpringerLink
A rotating mode radial line slot antenna (RLSA) with densely arrayed slots has already been proposed for plasma processing system and the basic characteristics were confirmed. Impact of static magnetic fields on the radial line slot ... The radial line slot antenna plasma source is used in semiconductor device fabrication. As is the case for all plasma sources, ever more strict uniformity control requirements are driven by the precision demands of new device technologies. Large volume diffusion plasmas, of which the radial line slot antenna source is one type, must overcome transport effects or diffusion modes that tend to ... Simulations of the Plasma Structure of a Radial Line ... The Radial Line Slot Antenna (RLSA) plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature. Radial line slot antenna having a conductive layer - Tokyo ... The plasma source 130 comprises a surface wave plasma (SWP) source, such as a radial line slot antenna (RLSA), to be discussed below. As seen in FIG. 1A, the plasma processing system 100 comprises a gas supply system 135 coupled to the processing chamber 110 and configured to introduce a process gas to process space 115. During dry plasma ...
Near field distributions in radial line slot antennas for ...
TEL Release TriasTM SPA Plasma Processing System Capable ... Based on the Radial Line Slot Antenna (RLSA) microwave plasma developed for semiconductor processes by Professor Tadahiro Ohmi at Tohoku University, the Trias SPA uses the unique Slot Plane Antenna (SPA) plasma generating technology established by TEL, after long years of cultivating plasma technology. Radial Line Slot Antenna - Chiba U A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA is almost negligible. A single-layered RLSA (SL-RLSA) has the simplest structure. APS -66th Annual Gaseous Electronics Conference - Event ... The radial line slot antenna plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature. Masahiro Horigome | Tokyo Electron, Tokyo | Electrical ...
Mar 2, 2018 ... 2699, A 60-GHZ INTEGRATED SLOT LOOP ANTENNA IN 0.13-µM .... THE COMPLEX PERMITTIVITY OF TIME-VARYING PLASMA ...... DISTRIBUTION OF CIRCULARLY POLARIZED RADIAL LINE SLOT ARRAY ANTENNAS.
Simulations of the Plasma Structure of a Radial Line ... The Radial Line Slot Antenna (RLSA) plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature. Large-area plasma excitation in densely arrayed radial ... A novel feeding structure using a TE11 (transverse electric) rotating mode in a radial line slot antenna for plasma production is proposed. Moreover, novel slot patterns with different coupling slot distributions are fabricated and tested. Extremely uniform plasma over a large diameter is observed and the possibility of control of the plasma distribution in the radial direction by changing to ... Formation, nature, and stability of the arsenic-silicon ...
The Radial Line Slot Antenna (RLSA) is a planar antenna having attributes such as high efficiency of about 70% and higher gain of about 33dBi compared with antennas in similar usage. A new design of feed for RLSA is presented.
the antenna aperture in this case. A radial line slot antenna (RLSA) for surface-wave-coupled plasma (SWP) is a promising candidate to this end. A novel slot arrangement in the aperture, consisting of densely arrayed transverse slots, was fabricated and tested. Radial Line Slot Antennas - Home - Springer Radial Line Slot Antennas Hiroyuki Arai* Yokohama National University, Yokohama, Kanagawa, Japan Abstract This chapter presents the development history of radial line slot antenna. The antennas are used for circular polarized high-gain antenna in microwave and millimeter wave bands. Linearly polarized arrays Radial Line Slot Antennas | SpringerLink Linearly polarized arrays are also provided by changing slot array arrangement. The feeding structures are given by a coaxial probe and cavity resonators, which is presented in detail. The applications of radial line slot antennas are satellite communication antenna, plasma etching, and high power use. This chapter also describes these ... Impact of static magnetic fields on the radial line slot ...
Dipole antenna - Wikipedia In radio and telecommunications a dipole antenna or doublet [1] is the simplest and most widely used class of antenna. [2] [3] The dipole is any one of a class of antennas producing a radiation pattern approximating that of an elementary …